PLD IV
| Name of the Equipment | PLD IV |
| Category | clean |
| Operator | |
| System Owner | Madhuri Mishra madhuri016@ee.iitb.ac.in Bhabani Prasad Sahu 184120017@iitb.ac.in |
| Short Name | |
| Make/ Model | Excel Instrument/ NA |
| Critical Tool | Yes |
| Serial Number | NA |
| FootPrint | |
| InstallationDate | 11/23/2015 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Nanoelectronics Processing Lab (NanoE bldg, 1st floor) |
| AMC | Required |
| Local Dealer | Dr. Subhash Pai Excel Instruments Gala no. 9 & 10, Bldg no.2, Dias Industrial Estate, Sativali Naka,Vasai (E), Palghar - 401 208. Ph: 91 250 2480377 www.excelinstruments.biz Cell: 9867312963 |
| Actual Dealer | Dr. Subhash Pai Excel Instruments Gala no. 9 & 10, Bldg no.2, Dias Industrial Estate, Sativali Naka,Vasai (E), Palghar - 401 208. Ph: 91 250 2480377 www.excelinstruments.biz Cell: 9867312963 |
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | GLIMPSE/280_GLIMPSE.pdf |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | 4488 Ext Flash 107 OR 111 |
| Substrate allowed | Si, Ge, Sapphire |
| Substrate Dimension | 2cm X 2cm max |
| Chemical allowed | IPA / Methanol for cleaning, BDFO |
| Precursors/ Targets allowed *Based on stock availability | BFO, BDFO, LSMO, PCMO, PZT, MgO, STO, PTFO, LifePo4, LicoO2, Co2MnSi |
| Precursor/ Target loaded inside tool | |
| Target dimension | 2cm X 2cm max |
| Gases allowed | Ar, O2, N2 |
| Contamination remarks | No Photoresist. Samples, targets form other PLDs not allowed |