Atmospheric Furnace_7.1 Lab
| Name of the Equipment | Atmospheric Furnace_7.1 Lab |
| Category | tbd |
| Operator | |
| System Owner | Pankajkumar Gound p15129@iitb.ac.in |
| Short Name | |
| Make/ Model | / |
| Critical Tool | No |
| Serial Number | |
| FootPrint | 1.5m X 1.5m |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | 7.1 Lab |
| AMC | Required |
| Local Dealer | |
| Actual Dealer | |
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | GLIMPSE/291_GLIMPSE.pdf |
| Tool Facilities Requirements | Electric power supply |
| Access | Open |
| Lab Phone No | 4438 |
| Substrate allowed | Glass, Quartz, All kinds of semiconductor wafer |
| Substrate Dimension | |
| Chemical allowed | NA, Inorganic and Organic Materials |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | N2, O2 |
| Contamination remarks |