UV-Ozone Cleaner_7.1 Lab
| Name of the Equipment | UV-Ozone Cleaner_7.1 Lab |
| Category | gold contaminated |
| Operator | Pankajkumar Gound |
| System Owner | Pankajkumar Gound p15129@iitb.ac.in |
| Short Name | |
| Make/ Model | Jelight/ 144AX-220 |
| Critical Tool | No |
| Serial Number | 14C004 |
| FootPrint | 20 cm X 1 m |
| InstallationDate | |
| Equipment Type | Miscellaneous |
| Location | 7.1 Lab |
| AMC | Not Required |
| Local Dealer | NA NA |
| Actual Dealer | Jelight Co, Inc 2 Mason Irvine, CA 92618 U.S.A. Tel: (949)380-8774 FAX: (949)768-9457 E-mail: sales@jelight.com |
| SOP | SOP/294_SOP.pdf |
| Training & other policy documents | |
| Recipies | |
| Glimpse | GLIMPSE/294_GLIMPSE.pdf |
| Tool Facilities Requirements | Electric power supply |
| Access | Open |
| Lab Phone No | 119 |
| Substrate allowed | Any |
| Substrate Dimension | Max 20 cm X 20 cm |
| Chemical allowed | Any, subject to review, Any |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | O2, N2 |
| Contamination remarks |