Tube Furnace_Fume hood 5
| Name of the Equipment | Tube Furnace_Fume hood 5 |
| Category | tbd |
| Operator | |
| System Owner | Pankajkumar Gound p15129@iitb.ac.in |
| Short Name | |
| Make/ Model | / |
| Critical Tool | No |
| Serial Number | 84092 |
| FootPrint | 1.5m X 1.5m |
| InstallationDate | 09/02/2012 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | 7.1 Lab |
| AMC | Required |
| Local Dealer | |
| Actual Dealer | |
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | GLIMPSE/295_GLIMPSE.pdf |
| Tool Facilities Requirements | Electric power supply |
| Access | Open |
| Lab Phone No | 119 |
| Substrate allowed | Glass, Quartz, All kinds of semiconductor wafers |
| Substrate Dimension | |
| Chemical allowed | , Organic, Inorganic, Metal-organic |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | N2, O2, Ar |
| Contamination remarks |