Equipment Details


AMAT-PVD-Preclean (Ch-C)

Name of the EquipmentAMAT-PVD-Preclean (Ch-C)
Categoryclean
Operator
System Owner
Short Name
Make/ Model/
Critical ToolNo
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationAMAT Lab
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4411
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks
Last updated on: 20-Jan-2023