Spin Coater_4 arm glove box
Name of the Equipment | Spin Coater_4 arm glove box |
Category | clean |
Operator | |
System Owner | Pankajkumar Gound p15129@iitb.ac.in |
Short Name | |
Make/ Model | Laurell/ WS-650 MZ-8 NPP/LITE |
Critical Tool | No |
Serial Number | |
FootPrint | 1m X 1m |
InstallationDate | |
Equipment Type | Deposition, Growth and Annealing systems |
Location | 7.1 Lab |
AMC | Required |
Local Dealer | Laurell |
Actual Dealer | |
SOP | |
Training & other policy documents | |
Recipies | |
Glimpse | GLIMPSE/309_GLIMPSE.pdf |
Tool Facilities Requirements | Electric power supply |
Access | Open |
Lab Phone No | 4434 |
Substrate allowed | |
Substrate Dimension | Max 7 |
Chemical allowed | , |
Precursors/ Targets allowed *Based on stock availability | |
Precursor/ Target loaded inside tool | |
Target dimension | |
Gases allowed | N2, O2 |
Contamination remarks |