| Name of the Equipment | SILAR controller |
| Category | clean |
| Operator | |
| System Owner | Pankajkumar Gound
p15129@iitb.ac.in
|
| Short Name | |
| Make/ Model | / HO-TH-03 |
| Critical Tool | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | 7.1 Lab |
| AMC | Required |
| Local Dealer |
|
| Actual Dealer |
|
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | 4438 |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | NA, |
Precursors/ Targets allowed
*Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | |
