| Name of the Equipment | Double Side Mask Aligner – MJB6 |
| Category | litho/analytical |
| Operator | Hemant Kshirsagar
Akshata(NH) Bhosle
|
| System Owner | Anjum Khan
anjum04@iitb.ac.in
Hemant Kshirsagar
hemant@ee.iitb.ac.in
|
| Short Name | |
| Make/ Model | SUSS |
| Critical Tool | No |
| Serial Number | MA6 |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Lithography tools |
| Location | Micro1 Yellow Room |
| AMC | Required |
| Local Dealer | Chintan Patel
|
| Actual Dealer | Karl SUSS
-- |
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | 6302 |
| Substrate allowed | |
| Substrate Dimension | Maximum 4 inch wafer |
| Chemical allowed | IPA for cleaning, |
Precursors/ Targets allowed
*Based on stock availability | -- |
| Precursor/ Target loaded inside tool | 63 |
| Target dimension | -- |
| Gases allowed | PN2, GN2 |
| Contamination remarks | |
