Multi target sputter – AJA International
| Name of the Equipment | Multi target sputter – AJA International |
| Category | gold contaminated |
| Operator | Hemant Kshirsagar |
| System Owner | Hemant Kshirsagar hemant@ee.iitb.ac.in Anjum Khan anjum04@iitb.ac.in |
| Short Name | |
| Make/ Model | |
| Critical Tool | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NMPF Lab |
| AMC | Required |
| Local Dealer | |
| Actual Dealer | AJA topgun@ajaint.com |
| SOP | SOP/330_SOP.pdf |
| Training & other policy documents | |
| Recipies | RECEPIES/330_RECEPIES.zip |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Controlled |
| Lab Phone No | 6287 |
| Substrate allowed | Si, Ge, GaN,GaAs,LSMO,PCMO,YIG,SRO, (No Glass) |
| Substrate Dimension | Max 4 inch. Sample height not more than 3 mm |
| Chemical allowed | , |
| Precursors/ Targets allowed *Based on stock availability | |
| Precursor/ Target loaded inside tool | 63 |
| Target dimension | 2 inch diameter |
| Gases allowed | O2, Ar, PN2 |
| Contamination remarks | Na, K containing samples not allowed |