Equipment Details

Deep Reactive Ion Etching – Samco

Name of the EquipmentDeep Reactive Ion Etching – Samco
Categorygold contaminated
OperatorHemant Kshirsagar
System OwnerHemant Kshirsagar

Anjum Khan

Short Name
Make/ ModelSAMCO
Critical ToolYes
Serial Number400 iPB
Equipment TypeDry Etch tools
LocationNMPF Lab
AMC Required
Local Dealer

Simco Global Technology & Systems Ltd 14 Bhawani Kunj, Behind Sector-D, Pocket-II, Vasant Kunj, New Delhi - 110070 India Tel.: +91-11-26894181, 26899867 (M): 9818203736 Fax: +91-11-26894101, +91-11-26124461 Email: Website:
Actual Dealer

Hirokazu AMAMORI Manager South-East Asia & India Region Samco Inc. International Sales Division: Head Office: 36 Wararya-cho, Takeda, Fushimi-ku, Kyoto 612-8443 Japan Tel: +81-75-621-7841 Mobile: +81-90-3064-6398 URL: Email:
Training & other policy documents
Tool Facilities Requirements
Lab Phone No6252
Substrate allowedSi, diamond
Substrate DimensionMaximum 4 inch wafer
Chemical allowed, Photoresist, SiO2, SiN, EBL resist.
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool63
Target dimension
Gases allowedSF6, C4F8, O2, Ar, PN2, GN2
Contamination remarksMetals, if present on the sample, should not be exposed to plasma. Need to cover them with resist.
Last updated on: 20-Jan-2023