RIE-1C Plasma Etcher– Samco
| Name of the Equipment | RIE-1C Plasma Etcher– Samco |
| Category | semi clean b |
| Operator | Hemant Kshirsagar Shilpa Kharat Minita Surwade (NH) |
| System Owner | Hemant Kshirsagar hemant@ee.iitb.ac.in Anjum Khan anjum04@iitb.ac.in |
| Short Name | |
| Make/ Model | SAMCO - RIE - 1C |
| Critical Tool | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Dry Etch tools |
| Location | NMPF Lab |
| AMC | Required |
| Local Dealer | SIMCO SIMCO |
| Actual Dealer | SAMCO Mr. Amamori, SAMCO |
| SOP | SOP/337_SOP.pdf |
| Training & other policy documents | |
| Recipies | RECEPIES/337_RECEPIES.pdf |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Controlled |
| Lab Phone No | 6252 |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | IPA for cleaning, |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 63 |
| Target dimension | NA |
| Gases allowed | CF4, O2, PN2 |
| Contamination remarks | Na, K not allowed |