Equipment Details


RIE-1C Plasma Etcher– Samco

Name of the EquipmentRIE-1C Plasma Etcher– Samco
Categorysemi clean b
OperatorHemant Kshirsagar
Shilpa Kharat
Minita Surwade (NH)
System OwnerHemant Kshirsagar
hemant@ee.iitb.ac.in

Anjum Ahmed (NH)
anjum04@iitb.ac.in

Short Name
Make/ ModelSAMCO - RIE - 1C
Critical Tool
Serial Number
FootPrint
InstallationDate
Equipment TypeDry Etch tools
LocationNMPF Lab
AMC Required
Local DealerSIMCO

SIMCO
Actual DealerSAMCO

Mr. Amamori, SAMCO
SOP SOP/337_SOP.pdf
Training & other policy documents
Recipies RECEPIES/337_RECEPIES.pdf
Glimpse
Tool Facilities Requirements
AccessControlled
Lab Phone No6252
Substrate allowed
Substrate Dimension
Chemical allowedIPA for cleaning,
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedCF4, O2, PN2
Contamination remarksNa, K not allowed
Last updated on: 20-Jul-2022