| Name of the Equipment | Wet bench_Metal etching |
| Category | gold contaminated |
| Operator | Hemant Kshirsagar
|
| System Owner | Anjum Khan
anjum04@iitb.ac.in
Hemant Kshirsagar
hemant@ee.iitb.ac.in
|
| Short Name | |
| Make/ Model | |
| Critical Tool | Yes |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Wet chemistry tools |
| Location | NMPF Lab |
| AMC | Required |
| Local Dealer |
|
| Actual Dealer |
|
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | Blowers, PN2, DI water |
| Access | Open |
| Lab Phone No | 6252 |
| Substrate allowed | NA |
| Substrate Dimension | NA |
| Chemical allowed | Metal etchants, Metal etchants, glassware |
Precursors/ Targets allowed
*Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 63 |
| Target dimension | NA |
| Gases allowed | PN2 |
| Contamination remarks | Metal etchants. These may contain acids and hence for safety, solvents are not allowed here. |
