Equipment Details

Wafer Dicer – ADT

Name of the EquipmentWafer Dicer – ADT
Categorygold contaminated
OperatorHemant Kshirsagar
Pankajkumar Gound
System OwnerHemant Kshirsagar

Anjum Khan

Short Name
Make/ ModelADT7122
Critical ToolYes
Serial Number
Equipment TypeMiscellaneous
LocationNMPF Lab
AMC Required
Local DealerMr. Rajalingam Ph - 9849307555
Actual DealerAdvanced Dicing Technologies

SOP SOP/342_SOP.pdf
Training & other policy documents
Glimpse GLIMPSE/342_GLIMPSE.pdf
Tool Facilities RequirementsN2 plant, chilled water, tap water
Lab Phone No6252
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool63
Target dimensionNo restriction on minimum size. Maximum 8 inch wafer
Gases allowed
Contamination remarks
Last updated on: 20-Jan-2023