Equipment Details


2D Materials CVD

Name of the Equipment2D Materials CVD
Categoryclean
Operator
System OwnerSera Sen (NH)
30004345@iitb.ac.in

Short Name
Make/ ModelPlanarTECH/PlanarGROW-2M
Critical ToolNo
Serial Number
FootPrint
InstallationDate03/01/2020
Equipment TypeDeposition, Growth and Annealing systems
Location2D Materials and Devices Lab
AMC Required
Local Dealer

Actual Dealer

SOP SOP/348_SOP.pdf
Training & other policy documentsPOLICY/348_POLICY.pdf
Recipies
Glimpse GLIMPSE/348_GLIMPSE.pdf
Tool Facilities RequirementsLiquid Nitrogen, Quartz tube
AccessControlled
Lab Phone No4456
Substrate allowedSi, Quartz, Sapphire
Substrate DimensionNA
Chemical allowedPTAS, Molybdenum, tungsten, sulphur - powders
Precursors/ Targets allowed
*Based on stock availability
Bring your own targets
Precursor/ Target loaded inside tool
Target dimension
Gases allowedN2, AR
Contamination remarks
Last updated on: 20-Jul-2022