| Name of the Equipment | DektakXT Profilometer_1.1 Lab |
| Category | clean |
| Operator | Minita Surwade (NH)
Shilpa Kharat
Anjum Khan
|
| System Owner | Pooja Sharma (H)
184073004@iitb.ac.in
|
| Short Name | |
| Make/ Model | Bruker/ Dektak XT |
| Critical Tool | Yes |
| Serial Number | |
| FootPrint | 455 mm W x 550 mm D x 370 mm H (17.9 inch W x 22.6 |
| InstallationDate | |
| Equipment Type | Material and structural characterization tools |
| Location | Nanoelectronics Processing Lab (NanoE bldg, 1st floor) |
| AMC | Required |
| Local Dealer | Icon Analytical Equipment Pvt. Ltd
Tushar Ph No.9320329883 |
| Actual Dealer |
Bruker |
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | Vacuum pump, clean air |
| Access | Open |
| Lab Phone No | 4435 |
| Substrate allowed | Si, Ge, Glass, Sapphire |
| Substrate Dimension | Min - 1cmx1cm, Max- 8 inch wafer |
| Chemical allowed | NA, No sticky and soft sample allowed.
Density should be greater than 1.001g/cm3 |
Precursors/ Targets allowed
*Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | Litho/ Analytical |
