Equipment Details

Ultech Furnace Dry Oxide

Name of the EquipmentUltech Furnace Dry Oxide
System Owner
Short Name
Make/ ModelUltech/ NA
Critical ToolNo
Serial NumberNA
FootPrintLenght 5.02 mtr, Breadth 2.15 mtr, Height 2.00 fo
Equipment TypeDeposition, Growth and Annealing systems
LocationNano Lab
AMC Required
Local DealerETS, Bangalore

Mr. Ramesh 09845000788
Actual DealerUltech

8-2, Horim-dong, Dalseo-gu, Dargu, Korea, 704240 Technical Division/ Assistant Manager : Mr. Kyeong-Sin-Kim TEL : 82-53-583-7565 FAX : 82-53-583-6872 H.P : 82-10-4264-3215 E-mail :
SOP SOP/74_SOP.pdf
Training & other policy documentsPOLICY/74_POLICY.pdf
Glimpse GLIMPSE/74_Glimpse.pdf
Tool Facilities Requirementschilled Water, GN2, PN2, Oxygen
Lab Phone No4411
Substrate allowedSi
Substrate Dimension2inch and 4 inch
Chemical allowedNA, Si
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedOxygen, Nitrogen,
Contamination remarksRCA cleaned wafers only allowed
Last updated on: 20-Jan-2023