Equipment Details

2 inch General purpose Forming gas(FGA)/ Ar /N2 annealing furnace

Name of the Equipment2 inch General purpose Forming gas(FGA)/ Ar /N2 annealing furnace
Categorygold contaminated
System OwnerPankajkumar Gound

Short Name
Make/ ModelAssembled/ NA
Critical ToolYes
Serial NumberNA
FootPrint3.75ft x 13 ft
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro1 Lab
AMC Required
Local DealerNA

Maintenance in house
Actual DealerNA

SOP SOP/75_SOP.pdf
Training & other policy documentsPOLICY/75_POLICY.rar
Glimpse GLIMPSE/75_Glimpse.pdf
Tool Facilities RequirementsN2, O2, FGA, Ar
Lab Phone No4405
Substrate allowedSilicon/ Glass
Substrate DimensionQuarter of 2inch, 2inch
Chemical allowedNA, all inorganic
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedAr/ N2/ O2/ forming gas
Contamination remarksPhoto resist samples not allowed
Last updated on: 20-Jan-2023