2 inch General purpose Forming gas(FGA)/ Ar /N2 annealing furnace
| Name of the Equipment | 2 inch General purpose Forming gas(FGA)/ Ar /N2 annealing furnace |
| Category | gold contaminated |
| Operator | |
| System Owner | Pankajkumar Gound p15129@iitb.ac.in |
| Short Name | |
| Make/ Model | Assembled/ NA |
| Critical Tool | Yes |
| Serial Number | NA |
| FootPrint | 3.75ft x 13 ft |
| InstallationDate | 11/17/2004 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Micro1 Lab |
| AMC | Required |
| Local Dealer | NA Maintenance in house |
| Actual Dealer | NA NA |
| SOP | SOP/75_SOP.pdf |
| Training & other policy documents | POLICY/75_POLICY.rar |
| Recipies | |
| Glimpse | GLIMPSE/75_Glimpse.pdf |
| Tool Facilities Requirements | N2, O2, FGA, Ar |
| Access | Open |
| Lab Phone No | 4405 |
| Substrate allowed | Silicon/ Glass |
| Substrate Dimension | Quarter of 2inch, 2inch |
| Chemical allowed | NA, all inorganic |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | Ar/ N2/ O2/ forming gas |
| Contamination remarks | Photo resist samples not allowed |