Equipment Details

2 inch CMOS specific FGA furnace

Name of the Equipment2 inch CMOS specific FGA furnace
Categorysemi clean b
OperatorPankajkumar Gound
System OwnerPankajkumar Gound

Short Name
Make/ ModelNA/ NA
Critical ToolYes
Serial NumberNA
FootPrint3.75 ft x13 ft
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro1 Lab
AMC Required
Local DealerNA

Inhouse maintenance
Actual DealerNA

SOP SOP/77_SOP.pdf
Training & other policy documentsPOLICY/
Glimpse GLIMPSE/77_Glimpse.pdf
Tool Facilities RequirementsN2, O2, FGA
Lab Phone No4405
Substrate allowedSilicon
Substrate DimensionQuarter of 2inch, 2inch
Chemical allowedNA, Si,SiO2
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2/ O2/ forming gas
Contamination remarksRCA cleaned wafer
Last updated on: 20-Jan-2023