2 inch CMOS specific FGA furnace
| Name of the Equipment | 2 inch CMOS specific FGA furnace |
| Category | semi clean b |
| Operator | Pankajkumar Gound |
| System Owner | Pankajkumar Gound p15129@iitb.ac.in |
| Short Name | |
| Make/ Model | NA/ NA |
| Critical Tool | Yes |
| Serial Number | NA |
| FootPrint | 3.75 ft x13 ft |
| InstallationDate | 06/10/2004 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Micro1 Lab |
| AMC | Required |
| Local Dealer | NA Inhouse maintenance |
| Actual Dealer | NA NA |
| SOP | SOP/77_SOP.pdf |
| Training & other policy documents | POLICY/77_POLICY.zip |
| Recipies | |
| Glimpse | GLIMPSE/77_Glimpse.pdf |
| Tool Facilities Requirements | N2, O2, FGA |
| Access | Open |
| Lab Phone No | 4405 |
| Substrate allowed | Silicon |
| Substrate Dimension | Quarter of 2inch, 2inch |
| Chemical allowed | NA, Si,SiO2 |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | N2/ O2/ forming gas |
| Contamination remarks | RCA cleaned wafer |