Equipment Details

Metal - sputter System

Name of the EquipmentMetal - sputter System
Categorygold contaminated
System Owner
Short Name
Make/ ModelNordiko/ Nordiko
Critical ToolNo
Serial NumberTFR16272
FootPrint270 cm x 255cm x 204 cm
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro1 Lab
AMC Required
Local DealerOm Scientific

A-2, Runwal Paradise, Bhusari Colony, Kothrud, Pune Maharastra, INDIA, Ph. No.: +91-9970513862
Actual DealerNordiko

Nordiko Technical Services Ltd 500/550 Nest Business Park Martin Road Havant Hampshire PO9 5TL United Kingdom, Ph no:+44 (0)23 92 48 82 00, email:
SOP SOP/86_SOP.pdf
Training & other policy documents
Glimpse GLIMPSE/86_Glimpse.pdf
Tool Facilities RequirementsArgongas, Nitrogen gas, Chiller
Lab Phone No4405
Substrate allowedSi/ Ge/ GaN/ Quartz/ Glass/ Saphire
Substrate DimensionPieces to 4 inch wafer
Chemical allowedIPA for cleaning purpose., Si/ Ge/ GaN/ Quartz/ Glass, Re sist(S1813, SU8)
Precursors/ Targets allowed
*Based on stock availability
Ti, Pt, Au, Cr, Ag, Pd, ITO, Mo, Ir, Cu, W
Precursor/ Target loaded inside tool
Target dimensiononly 4 inch.
Gases allowedArgon, Nitrogen
Contamination remarksGold Contaminated.
Last updated on: 20-Jan-2023