Metal - sputter System
| Name of the Equipment | Metal - sputter System |
| Category | gold contaminated |
| Operator | |
| System Owner | |
| Short Name | |
| Make/ Model | Nordiko/ Nordiko |
| Critical Tool | No |
| Serial Number | TFR16272 |
| FootPrint | 270 cm x 255cm x 204 cm |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Micro1 Lab |
| AMC | Required |
| Local Dealer | Om Scientific A-2, Runwal Paradise, Bhusari Colony, Kothrud, Pune Maharastra, INDIA, Ph. No.: +91-9970513862 |
| Actual Dealer | Nordiko Nordiko Technical Services Ltd 500/550 Nest Business Park Martin Road Havant Hampshire PO9 5TL United Kingdom, Ph no:+44 (0)23 92 48 82 00, email: enquiries@nordiko-tech.com |
| SOP | SOP/86_SOP.pdf |
| Training & other policy documents | |
| Recipies | RECEPIES/86_RECEPIES.pdf |
| Glimpse | GLIMPSE/86_Glimpse.pdf |
| Tool Facilities Requirements | Argongas, Nitrogen gas, Chiller |
| Access | Open |
| Lab Phone No | 4405 |
| Substrate allowed | Si/ Ge/ GaN/ Quartz/ Glass/ Saphire |
| Substrate Dimension | Pieces to 4 inch wafer |
| Chemical allowed | IPA for cleaning purpose., Si/ Ge/ GaN/ Quartz/ Glass, Re sist(S1813, SU8) |
| Precursors/ Targets allowed *Based on stock availability | Ti, Pt, Au, Cr, Ag, Pd, ITO, Mo, Ir, Cu, W |
| Precursor/ Target loaded inside tool | |
| Target dimension | only 4 inch. |
| Gases allowed | Argon, Nitrogen |
| Contamination remarks | Gold Contaminated. |