Equipment Details

Thermal Evaporator - Al

Name of the EquipmentThermal Evaporator - Al
Categorygold contaminated
OperatorAnjum Khan
Minita Surwade (NH)
Shilpa Kharat
System OwnerShilpa Kharat

Minita Surwade (NH)

Short Name
Make/ Model/
Critical ToolYes
Serial Number
FootPrint200 x 140 x 203 cm
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro1 Lab
AMC Required
Local DealerMr. Khan

Hind Hivac, Mr. Khan, Bangalore, Mob. - 9740992085, Email ID -
Actual Dealer

SOP SOP/88_SOP.pdf
Training & other policy documents
Glimpse GLIMPSE/88_Glimpse.pdf
Tool Facilities RequirementsLN2, Water
Lab Phone No4405
Substrate allowedGlass, Silicon, Polymer, glass, qurtz, Ge
Substrate Dimensionsmall pecies to 4 inch
Chemical allowedIPA, Any material (including photoresists) that will not evaporate up to 100 C
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionpellets, slugs
Gases allowedLiquid Nitrogen
Contamination remarksSeparate crucibles need to be used for different metals
Last updated on: 20-Jan-2023