Equipment Details


Karl Suss MJB3 Mask Aligner

Name of the EquipmentKarl Suss MJB3 Mask Aligner
Categorylitho/analytical
Operator
System Owner
Short Name
Make/ ModelSUSS MicroTec/ MJB-3
Critical ToolNo
Serial Number
FootPrint
InstallationDate12/01/1985
Equipment TypeLithography tools
LocationApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
AMC Required
Local DealerAnand Vairagar - OM Scientific

M/s OmScientific, Pune, Shailesh Latey shaileshlatey@gmail.com 9175631100
Actual DealerSUSS MicroTec

M/s Suss MicroTec, Germany, http://www.suss.com/en.html
SOP SOP/91_SOP.pdf
Training & other policy documentsPOLICY/91_Policy.pdf
Recipies RECEPIES/91_RECEPIES.pdf
Glimpse GLIMPSE/91_Glimpse.pdf
Tool Facilities RequirementsNitrogen gas
AccessOpen
Lab Phone No4493
Substrate allowedSi, GaN
Substrate Dimension2 inch max
Chemical allowedphotoresists, sio2, Si
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2 gas
Contamination remarks
Last updated on: 20-Jan-2023