Equipment Details


Name of the EquipmentSTSRIE
Categorysemi clean a
OperatorAkshata(NH) Bhosle
Pankajkumar Gound
Shilpa Kharat
System OwnerShilpa Kharat

Rowtu Srinu (H)

Short Name
Make/ ModelSTS/ 320 PC
Critical ToolYes
Serial Number
Equipment TypeDry Etch tools
LocationMicro1 Yellow Room
AMC Required
Local Dealer

Actual DealerM/s. CTP Company Services.

M/s. CTP Company Services., 3 Commercial Road, Cwmfelinfach, Near Newport, Gwent, NP11-7HW, U.K. Mob: 7754002875 Email:
SOP SOP/93_SOP.pdf
Training & other policy documentsPOLICY/93_POLICY.pdf
Glimpse GLIMPSE/93_GLIMPSE.pdf
Tool Facilities Requirementschiller, Nitrogen gas(GN2, PN2) and process gases CF4, SF6, CHF3, O2
Lab Phone No4493
Substrate allowedSi, Ge, GeSn, Diamond
Substrate DimensionPieces to 6 inch wafer
Chemical allowedNA, SiO2, Si, Ge, Photoresists, HfO2, Al2O3, TiO2, NbN, Pt
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedSF6, CF4, CHF3, O2, N2
Contamination remarksOnly Pt is allowed for inside the chamber as hard mask. Metal etching is not allowed.
Last updated on: 20-Jan-2023