PLD I
| Name of the Equipment | PLD I |
| Category | gold contaminated |
| Operator | |
| System Owner | Madhuri Mishra madhuri016@ee.iitb.ac.in |
| Short Name | |
| Make/ Model | Excel Instruments/ NA |
| Critical Tool | Yes |
| Serial Number | NA |
| FootPrint | ( Length 1.95 mtr, Breadth 2.28 mtr, Height1.57) |
| InstallationDate | 2008 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Nanoelectronics Processing Lab (NanoE bldg, 1st floor) |
| AMC | Required |
| Local Dealer | Dr. Subhash Pai/ Dr Lalit Kumar & Ganesan For Comprex Pro Excimer LASER - Laser Science (sales@laserscience.in,Service@laserscience.in - 02241553232) Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093 Phone:022 6500 8911 Mobile No:9867312963 |
| Actual Dealer | Dr. Subhash Pai/ Dr. Lalit Kumar & Ganesan For Comprex Pro Excimer LASER - Laser Science (sales@laserscience.in,Service@laserscience.in - 02241553232) Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093 Phone:022 6500 8911 Mobile No:9867312963 |
| SOP | SOP/95_SOP.pdf |
| Training & other policy documents | POLICY/95_POLICY.pdf |
| Recipies | |
| Glimpse | GLIMPSE/95_Glimpse.pdf |
| Tool Facilities Requirements | Ar, O2, Water |
| Access | Controlled |
| Lab Phone No | 4488 Ext Flash 107 OR 111 |
| Substrate allowed | Si/ Ge/ GaN/ Quartz/ GaAs, sapphire |
| Substrate Dimension | 1cm x 1cm |
| Chemical allowed | NA, Si, Ge, GaN, Quartz, GaAs, ZnO, MgO, ZnMgO, BaTiO3, SrBi2Ta2O9, PCMO, ZFO, CFO, In2O3, Ga2O3, NiO, BN, BaBiO3 |
| Precursors/ Targets allowed *Based on stock availability | ZnO, MgO, ZnMgO, BaTiO3, SrBi2Ta2O9, PCMO, ZFO, CFO, In2O3, Ga2O3 |
| Precursor/ Target loaded inside tool | |
| Target dimension | 20MM X 20MM |
| Gases allowed | Oxygen, Nitrogen |
| Contamination remarks | No Photoresists. Na+ and K+ are not allowed. For outside/ NCPRE/ Org electronics lab samples, contact SO/ Process engineer. |