Equipment Details


PLD I

Name of the EquipmentPLD I
Categorygold contaminated
Operator
System OwnerSana Ayyuby
184120011@iitb.ac.in

Madhuri Mishra
madhuri016@ee.iitb.ac.in

Short Name
Make/ ModelExcel Instruments/ NA
Critical ToolYes
Serial NumberNA
FootPrint( Length 1.95 mtr, Breadth 2.28 mtr, Height1.57)
InstallationDate2008
Equipment TypeDeposition, Growth and Annealing systems
LocationNanoelectronics Processing Lab (NanoE bldg, 1st floor)
AMC Required
Local DealerDr. Subhash Pai/ Dr Lalit Kumar & Ganesan

For Comprex Pro Excimer LASER - Laser Science (sales@laserscience.in,Service@laserscience.in - 02241553232) Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093 Phone:022 6500 8911 Mobile No:9867312963
Actual DealerDr. Subhash Pai/ Dr. Lalit Kumar & Ganesan

For Comprex Pro Excimer LASER - Laser Science (sales@laserscience.in,Service@laserscience.in - 02241553232) Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093 Phone:022 6500 8911 Mobile No:9867312963
SOP SOP/95_SOP.pdf
Training & other policy documentsPOLICY/95_POLICY.pdf
Recipies
Glimpse GLIMPSE/95_Glimpse.pdf
Tool Facilities RequirementsAr, O2, Water
AccessControlled
Lab Phone No4488 Ext Flash 107 OR 111
Substrate allowedSi/ Ge/ GaN/ Quartz/ GaAs, sapphire
Substrate Dimension1cm x 1cm
Chemical allowedNA, Si, Ge, GaN, Quartz, GaAs, ZnO, MgO, ZnMgO, BaTiO3, SrBi2Ta2O9, PCMO, ZFO, CFO, In2O3, Ga2O3, NiO, BN
Precursors/ Targets allowed
*Based on stock availability
ZnO, MgO, ZnMgO, BaTiO3, SrBi2Ta2O9, PCMO, ZFO, CFO, In2O3, Ga2O3
Precursor/ Target loaded inside tool
Target dimension20MM X 20MM
Gases allowedOxygen, Nitrogen
Contamination remarksNo Photoresists. Na+ and K+ are not allowed. For outside/ NCPRE/ Org electronics lab samples, contact SO/ Process engineer.
Last updated on: 20-Jul-2022