Wafer bonder
| Name of the Equipment | Wafer bonder |
| Category | gold contaminated |
| Operator | |
| System Owner | Gaurav Garg NH gaurav.garg@iitb.ac.in |
| Short Name | |
| Make/ Model | EV Group/ EVG520 |
| Critical Tool | No |
| Serial Number | NA |
| FootPrint | 1.22 mtrs X 0.75 mtrs |
| InstallationDate | 03/10/2008 |
| Equipment Type | Miscellaneous |
| Location | Spectroscopy Lab |
| AMC | Required |
| Local Dealer | M/s Norinco Pvt. Ltd. M/s Norinco Pvt. Ltd., Nowroji Mansion, 6th floor, 31, Nathelal Parikh Marg, Mumbai400039 Tel-022-22842042/22841368 Email: ntavanandi@norinco.co.in, hydro@nornico.co.in |
| Actual Dealer | M/s E.V. Group M/s E.V. Group, E. Thallner GmbH, DI Erich Thallner StraBe 1A-4780 Scharding, Austria Email: Sales@EVGroup.com Phone: 43 7712 5311 0 |
| SOP | SOP/97_SOP.pdf |
| Training & other policy documents | POLICY/97_POLICY.pdf |
| Recipies | RECEPIES/97_RECEPIES.pdf |
| Glimpse | GLIMPSE/97_Glimpse.pdf |
| Tool Facilities Requirements | Water connection, Nitrogen |
| Access | Open |
| Lab Phone No | 4411 |
| Substrate allowed | Si, Glass |
| Substrate Dimension | Max- 5 inch wafer, Min- 2 inch wafer |
| Chemical allowed | IPA for cleaning, SiO2, SiNx, a-Si |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | It is gold contaminated chamber. Na+ & K+ containing samples are strictly not allowed. For outside/ NCPRE/ Org electronics lab samples, contact SO/Process engineer. |