6 Target E Beam Evaporator
Name of the Equipment | 6 Target E Beam Evaporator |
Category | gold contaminated |
Operator | |
System Owner | Goma Kumari KC gomakc@iitb.ac.in |
Short Name | |
Make/ Model | Semicore/ NA |
Critical Tool | No |
Serial Number | NA |
FootPrint | 2 x3 m |
InstallationDate | 2013 |
Equipment Type | Deposition, Growth and Annealing systems |
Location | MBE Clean Room 2 (NanoE bldg, Gr floor) |
AMC | Required |
Local Dealer | OM Scientific OM Scientific |
Actual Dealer | OM Scientific OM Scientific |
SOP | SOP/99_SOP.pdf |
Training & other policy documents | POLICY/99_POLICY.pdf |
Recipies | |
Glimpse | GLIMPSE/99_GLIMPSE.pdf |
Tool Facilities Requirements | N2, Chilled water |
Access | Controlled |
Lab Phone No | 4488 Ext Flash 109 |
Substrate allowed | Si, Ge, GaAs GaN, Glass, Quartz |
Substrate Dimension | Pieces to 4 inch wafer |
Chemical allowed | NA, Gold, Nickel, Gold-Germanium alloy, Titanium |
Precursors/ Targets allowed *Based on stock availability | Au, Ni, Ti, Au-Ge alloy |
Precursor/ Target loaded inside tool | |
Target dimension | NA |
Gases allowed | Nitrogen |
Contamination remarks | Al coated, HfO2, Carbon, copper etc samples are not allowed |