Equipment Status

2D Materials and Devices Lab

LIC : Bikash Dev Choudhury (NH), Deepti Rukade, Srilagna Sahoo (H)

#	System Name	System Owner	Faculty in-charge	Location	Status
1	2-arm Glove Box (Open access)	Pankajkumar Gound Srilagna Sahoo (H)	Saurabh Lodha	2D Materials and Devices Lab	Working
2	2D Materials CVD (Controlled access)	Sera Sen (NH)	Saurabh Lodha	2D Materials and Devices Lab	Working
3	LabRAM HR Evolution-RAMAN (Controlled access)	Sera Sen (NH)	Saurabh Lodha	2D Materials and Devices Lab	Working
4	Optical Setup (micro-PL) (Controlled access)	Srilagna Sahoo (H)	Saurabh Lodha	2D Materials and Devices Lab	Partially Working
5	Phoenix (Open access)	Mayank Goyal Atirah Zahoor(H)	Saurabh Lodha	2D Materials and Devices Lab	Working
6	Raith Voyager (Open access)			2D Materials and Devices Lab	Working
7	Wire bonder (TPT HB05)_Gold (Controlled access)	Pankajkumar Gound Srilagna Sahoo (H)	Saurabh Lodha	2D Materials and Devices Lab	Working

7.1 Lab

LIC : Bikash Dev Choudhury (NH), Deepti Rukade, Pankajkumar Gound

#	System Name	System Owner	Faculty in-charge	Location	Status
8	2 inch general purpose annealing furnace_Fume hood 3 (Open access)	Pankajkumar Gound	Sandip Mondal	7.1 Lab	Working
9	4-arm glove box_7.1 lab (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
10	Atmospheric Furnace_7.1 Lab (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
11	Barn-stead Lab-line Oven (Open access)	Minita Surwade (NH) Pankajkumar Gound	Dipankar Saha	7.1 Lab	Not Working
12	Contact Angle System (Data Physics) (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
13	Dip Coater (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
14	Drying Oven_7.1 Lab (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
15	FTIR Spectrometer (Spectrum 65) (Open access)	Pankajkumar Gound	Kasturi Saha	7.1 Lab	Working
16	Fume Hood 4 (Open access)	Pankajkumar Gound		7.1 Lab	Working
17	Hot plate with stirrer (1)_Fume Hood 1 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
18	Hot plate with stirrer (2)_Fume Hood 1 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
19	Hot plate with stirrer (3)_2 arm glove box (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
20	Hot plate with stirrer (4)_4-arm glove box (Open access)	Pankajkumar Gound		7.1 Lab	Working
21	Hydrothermal Reactor_Fume Hood 2 (Controlled access)			7.1 Lab	Working
22	Leica Microscope (Open access)	Anjum Khan		7.1 Lab	Working
23	pH Meter (Open access)	Pankajkumar Gound		7.1 Lab	Working
24	Schlenk Line (1)_Fume Hood 1 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
25	Schlenk Line (2)_Fume Hood 3 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
26	SILAR controller (Open access)	Pankajkumar Gound		7.1 Lab	Working
27	Spin Coater_4 arm glove box (Open access)	Pankajkumar Gound		7.1 Lab	Working
28	Thermogravimetric Analyzer (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
29	Tube Furnace_Fume hood 5 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
30	Ultrasonicator_Fume Hood 1 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
31	UV-Ozone Cleaner_7.1 Lab (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
32	UV-Vis-Spectrometer - Lambda 25 (7.1 Lab) (Open access)	Shahiroze Khetani Pankajkumar Gound	Kasturi Saha	7.1 Lab	Working

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)

LIC : Deepti Rukade, Kanchan Singh Rana

#	System Name	System Owner	Faculty in-charge	Location	Status
33	Temperature Dependent Spectral Response Measurement system - PL set up (Controlled access)	Navneet Kumar Thakur [H] Kanchan Singh Rana	Dipankar Saha	Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)	Working
34	Transient Absorption Pump Probe Spectrometer (Controlled access)	Kanchan Singh Rana Navneet Kumar Thakur [H]	Dipankar Saha	Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)	Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)

LIC : Bazila (H) Parvez, Deepti Rukade, Mahalaxmi Patil

#	System Name	System Owner	Faculty in-charge	Location	Status
35	Magnetoresistance Setup (Controlled access)	Akanksha Chouhan	Ashwin Tulapurkar	Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)	Working
36	RF Cryogenic Device Characterization system (Controlled access)		Dipankar Saha	Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)	Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)

LIC : Deepti Rukade, Kanchan Singh Rana, Kulasekaran Muniappan, Navneet Kumar Thakur [H]

#	System Name	System Owner	Faculty in-charge	Location	Status
37	FPA (Focal Plane Array) Characterization set up (Open access)	Kulasekaran Muniappan	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working
38	Hall Measurement System (Open access)	Kulasekaran Muniappan	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working
39	Spectral Response-single pixel characterisation (Controlled access)	Kulasekaran Muniappan	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working
40	Wire Bonder_Hybond (Open access)	Kulasekaran Muniappan	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working

Bio Sensors Lab (NanoE bldg, 7th floor)

LIC : Bikash Dev Choudhury (NH), Deepti Rukade, Madhuri Vinchurkar

#	System Name	System Owner	Faculty in-charge	Location	Status
41	Contact Angle Instrument (GBX) (Open access)	Pankajkumar Gound	Saurabh Lodha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
42	Eppendorf FemtoJet 4x Microinjector (Open access)	Pankajkumar Gound	Soumyo Mukherji	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
43	Fluorescence Microscope (Z1) (Controlled access)	Pankajkumar Gound	Kasturi Saha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
44	FTIR (Open access)	Shahiroze Khetani Pankajkumar Gound	Kasturi Saha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
45	Laser Engraving System (LES) (Open access)	Pankajkumar Gound	Soumyo Mukherji	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
46	Owlstone Vapour Generator (OVG-4) (Open access)	Pankajkumar Gound	Saurabh Lodha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
47	Potentiostat (Open access)	Pankajkumar Gound	Saurabh Lodha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
48	UV-Vis-NIR Spectrometer - Lambda 750 (Controlled access)	Pankajkumar Gound	Kasturi Saha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)

LIC : Bikash Dev Choudhury (NH), Deepti Rukade, Paritosh Meihar

#	System Name	System Owner	Faculty in-charge	Location	Status
49	Aries(Temperature Dependent IV/CV) (Open access)	Paritosh Meihar	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Partially Working
50	Cryogenic probe station (Controlled access)	Pooja Sharma (H)	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Not Working
51	Polaris (Stress/Long Time Measurements) (Open access)	Paritosh Meihar Jayatika (H) Sakhuja	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
52	Proxima (Fast IV Measurement/ B1500) (Open access)	Paritosh Meihar	Sandip Mondal	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
53	RIGEL (Keysight B1500) (Open access)	Paritosh Meihar Jayatika (H) Sakhuja	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
54	Sirius (NBTI Setup) (Open access)	Paritosh Meihar	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working

EC Lab

LIC : Bikash Dev Choudhury (NH), Deepti Rukade, Madhuri Mishra, Minita Surwade (NH)

#	System Name	System Owner	Faculty in-charge	Location	Status
55	Cross section TEM sample preparation unit - Dimpler (Controlled access)	Minita Surwade (NH)	Sandip Mondal	EC Lab	Working
56	Cross section TEM sample preparation unit - Disc Cutter (Controlled access)	Minita Surwade (NH)	Sandip Mondal	EC Lab	Working
57	Cross section TEM sample preparation unit - PIPS (Controlled access)	Minita Surwade (NH)	Sandip Mondal	EC Lab	Working
58	Cross section TEM sample preparation unit - Ultrasonic Cutter (Controlled access)	Minita Surwade (NH)	Sandip Mondal	EC Lab	Working
59	EC Lab Hot air Oven (Open access)	Minita Surwade (NH)	Ashwin Tulapurkar	EC Lab	Working
60	Electroplating system - Au/Ni/Cu (Open access)	Minita Surwade (NH)	Dipankar Saha	EC Lab	Working
61	General Purpose Wet Bench (EC Lab) (Open access)	Minita Surwade (NH)	Sandip Mondal	EC Lab	Working
62	Logitech PM5 Precision Lapping and Polishing Machine (Controlled access)	Kulasekaran Muniappan	Subhananda Chakrabarti	EC Lab	Working
63	Logitech WSB2 Wafer Substrate Bonding Unit (Open access)	Kulasekaran Muniappan	Subhananda Chakrabarti	EC Lab	Working
64	PLD target making furnace (Open access)	Madhuri Mishra Minita Surwade (NH)	Subhananda Chakrabarti	EC Lab	Working
65	Spinner 2 Inch (PDMS) (Open access)	Minita Surwade (NH)	Dipankar Saha	EC Lab	Working
66	Vapor generator for explosive detection (Open access)		V Ramgopal Rao	EC Lab	Working

MBE Clean Room 1 (NanoE bldg, Gr floor)

LIC : Bikash Dev Choudhury (NH), Deepti Rukade, Kulasekaran Muniappan, Raveesh Gourishetty

#	System Name	System Owner	Faculty in-charge	Location	Status
67	Molecular Beam Epitaxy III Nitrides (Controlled access)	Soumyadip Chatterjee (H)	Apurba Laha	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working
68	Molecular Beam Epitaxy III-V (Controlled access)		Subhananda Chakrabarti	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working
69	Molecular Beam Epitaxy Si Ge Sn (Controlled access)	Dhammapriy Gayakwad	Suddhasatta Mahapatra	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working

MBE Clean Room 2 (NanoE bldg, Gr floor)

LIC : Bikash Dev Choudhury (NH), Deepti Rukade, Kulasekaran Muniappan, Rajib Saha, Raveesh Gourishetty

#	System Name	System Owner	Faculty in-charge	Location	Status
70	6 Target E Beam Evaporator (Controlled access)	Goma Kumari KC	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
71	Dicer (Controlled access)	Kulasekaran Muniappan	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
72	Flip Chip Bonder (Controlled access)	Kulasekaran Muniappan	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
73	In Thermal Evaporator (Controlled access)	Goma Kumari KC	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working

MCL Lab

LIC : Bikash Dev Choudhury (NH), Deepti Rukade, Shashank Rai

#	System Name	System Owner	Faculty in-charge	Location	Status
74	Wire Bonder (TPT HB16)_Aluminium (Controlled access)	Anjum Khan Pankajkumar Gound	Saurabh Lodha	MCL Lab	Working

Micro1 Lab

LIC : Anjum Khan, Bikash Dev Choudhury (NH), Deepti Rukade, Minita Surwade (NH)

#	System Name	System Owner	Faculty in-charge	Location	Status
75	2 inch Boron_Solid source Diffusion Furnace (Open access)	Pankajkumar Gound	Sandip Mondal	Micro1 Lab	Working
76	2 inch CMOS specific FGA furnace (Open access)	Pankajkumar Gound	Sandip Mondal	Micro1 Lab	Working
77	2 inch Dry oxidation Furnace (Open access)	Arpit Mishra Pankajkumar Gound	Sandip Mondal	Micro1 Lab	Working
78	2 inch General purpose Forming gas(FGA)/ Ar /N2 annealing furnace (Open access)	Pankajkumar Gound	Sandip Mondal	Micro1 Lab	Working
79	2 inch N2 Annealing Furnace (Open access)	Pankajkumar Gound	Sandip Mondal	Micro1 Lab	Working
80	2 inch Phosphorous_Solid source Diffusion Furnace (Open access)	Pankajkumar Gound	Sandip Mondal	Micro1 Lab	Partially Working
81	2 inch Wet oxidation Furnace (Open access)	Arpit Mishra Pankajkumar Gound	Sandip Mondal	Micro1 Lab	Working
82	4 target E-beam evaporator (Open access)	Arpit Mishra Minita Surwade (NH)	Apurba Laha	Micro1 Lab	Partially Working
83	Dielectric - sputter System (Open access)	Minita Surwade (NH) Arpit Mishra	Ashwin Tulapurkar	Micro1 Lab	Not Working
84	Gold Electroplating System (Open access)		Dipankar Saha	Micro1 Lab	Working
85	HRXRD (Controlled access)	Pankajkumar Gound Swagata Bhunia	Apurba Laha	Micro1 Lab	Not Working
86	Parylene CVD – SCS (Controlled access)	Shahiroze Khetani Hemant Kshirsagar	Saurabh Lodha	Micro1 Lab	Partially Working
87	Thermal Evaporator - Al (Open access)	Shilpa Kharat Shahiroze Khetani	Sandip Mondal	Micro1 Lab	Working
88	Thermal Evaporator-Cr/Au (Open access)	Shilpa Kharat Shahiroze Khetani	Saurabh Lodha	Micro1 Lab	Working
89	Tube Washer (Open access)	Minita Surwade (NH)	Sandip Mondal	Micro1 Lab	Working
90	Wafer Dicer – ADT (Controlled access)	Hemant Kshirsagar Pankajkumar Gound	Ashwin Tulapurkar	Micro1 Lab	Working

Micro1 Yellow Room

LIC : Anjum Khan, Bikash Dev Choudhury (NH), Deepti Rukade

#	System Name	System Owner	Faculty in-charge	Location	Status
91	Double Side Mask Aligner – MJB6 (Open access)	Pankajkumar Gound Hemant Kshirsagar	Dipankar Saha	Micro1 Yellow Room	Working
92	Karl Suss MJB4 Mask Aligner (Open access)	Hemant Kshirsagar	Avradeep Pal	Micro1 Yellow Room	Working
93	Laser Writer (Open access)		Kasturi Saha	Micro1 Yellow Room	Partially Working
94	Microwriter ML 3 (Open access)	manshi chaturvedi	Kasturi Saha	Micro1 Yellow Room	Working
95	Multi-pocket Electron-beam Evaporator (4 target - GaN) (Controlled access)	Mahalaxmi Patil	Dipankar Saha	Micro1 Yellow Room	Not Working
96	Spinner 2 inch (General Purpose) (Open access)	manshi chaturvedi Hemant Kshirsagar	Saurabh Lodha	Micro1 Yellow Room	Working
97	Spinner 2 inch (PPR -AZ) (Open access)	Pankajkumar Gound Hemant Kshirsagar	Saurabh Lodha	Micro1 Yellow Room	Working
98	STSRIE (Open access)	Shilpa Kharat Rowtu Srinu (H)	Suddhasatta Mahapatra	Micro1 Yellow Room	Working
99	Wet bench_Developing station (Open access)	Anjum Khan Hemant Kshirsagar	Saurabh Lodha	Micro1 Yellow Room	Working

Micro2 Lab

LIC : Anjum Khan, Bikash Dev Choudhury (NH), Deepti Rukade, Madhuri Mishra

#	System Name	System Owner	Faculty in-charge	Location	Status
100	4 probe Measurement (Automatic) (Open access)	Shilpa Kharat Manisha Bansode	Saurabh Lodha	Micro2 Lab	Working
101	4 Probe Measurement (Manual) (Open access)	Anjum Khan	Saurabh Lodha	Micro2 Lab	Working
102	DektakXT Profilometer (Open access)	Arpit Mishra Shilpa Kharat	Saurabh Lodha	Micro2 Lab	Working
103	Filmetrics Reflectometer (Open access)	Manisha Bansode Shilpa Kharat	Udayan Ganguly	Micro2 Lab	Working
104	Hot wire CVD(HWCVD) (Open access)	Anjum Khan	Saurabh Lodha	Micro2 Lab	Partially Working
105	Organic Evaporation System (Open access)	Anjum Khan	Dinesh Kabra	Micro2 Lab	Working
106	Photoluminescence Measurement set up (PL Set up) (Controlled access)	Kulasekaran Muniappan	Subhananda Chakrabarti	Micro2 Lab	Partially Working
107	Plasma Immersion Ion Implantation (PIII) (Open access)	Anjum Khan	Saurabh Lodha	Micro2 Lab	Working
108	X-ray Photoelectron Spectroscopy (Controlled access)	Anjum Khan Deepti Rukade	Saurabh Lodha	Micro2 Lab	Not Working

Nano 2 Lab

LIC : Bikash Dev Choudhury (NH), Deepti Rukade, Hemant Kshirsagar

#	System Name	System Owner	Faculty in-charge	Location	Status
109	Deep Reactive Ion Etching – Samco (Controlled access)	Hemant Kshirsagar Anjum Khan	Suddhasatta Mahapatra	Nano 2 Lab	Not Working
110	Rapid Thermal Process_NMPF Lab_General (Controlled access)	Hemant Kshirsagar Anjum Khan	Dipankar Saha	Nano 2 Lab	Working
111	Sputter NMPF (Controlled access)	Hemant Kshirsagar Anjum Khan	Ashwin Tulapurkar	Nano 2 Lab	Working

Nano Lab

LIC : Anjum Khan, Bikash Dev Choudhury (NH), Deepti Rukade, Hemant Kshirsagar, Rowtu Srinu (H)

#	System Name	System Owner	Faculty in-charge	Location	Status
112	ALD (Non LL) (Open access)	Anjum Khan	Saurabh Lodha	Nano Lab	Working
113	ALD LL (Controlled access)	Anjum Khan	Saurabh Lodha	Nano Lab	Working
114	Inductively coupled plasma CVD (ICPCVD) (Open access)	Pradeep Nyaupane Hemant Kshirsagar	Dipankar Saha	Nano Lab	Partially Working
115	Nano Wet Bench (Open access)	Deepti Rukade	Saurabh Lodha	Nano Lab	Working
116	Olympus Microscope_Nano Lab (Open access)	Anjum Khan Deepti Rukade	Dipankar Saha	Nano Lab	Working
117	Rapid Thermal Processing_Nano lab_General (Open access)	Arpit Sahu Minita Surwade (NH)	Dipankar Saha	Nano Lab	Working
118	Sentech Ellipsometer (Open access)	Deepti Rukade Shubham Patil (H)	Sandip Mondal	Nano Lab	Not Working
119	Sputter ATC 2200 (Open access)	Shubham Patil (H) Paritosh Meihar	Udayan Ganguly	Nano Lab	Partially Working
120	Sputter Orion (Controlled access)	Hemant Kshirsagar Akanksha Chouhan	Ashwin Tulapurkar	Nano Lab	Working

Nano Litho Lab

LIC : Bikash Dev Choudhury (NH), Deepti Rukade, Hemant Kshirsagar, Rowtu Srinu (H)

#	System Name	System Owner	Faculty in-charge	Location	Status
121	Double Sided Aligner (DSA) (Open access)	Hemant Kshirsagar	Dipankar Saha	Nano Litho Lab	Working
122	RaithEBL_Long (Open access)	Anuj Bathla (H) Brijesh Kumar	Suddhasatta Mahapatra	Nano Litho Lab	Working
123	RaithEBL_Short (Open access)	Brijesh Kumar Anuj Bathla (H)	Suddhasatta Mahapatra	Nano Litho Lab	Working
124	Spin Coater – Laurell (Open access)	Hemant Kshirsagar	Dipankar Saha	Nano Litho Lab	Working
125	Spinner 2 inch (PPR) (Open access)	Hemant Kshirsagar	Dipankar Saha	Nano Litho Lab	Working
126	Spinner 4 inch (PMMA) (Open access)	Hemant Kshirsagar	Dipankar Saha	Nano Litho Lab	Partially Working
127	Spinner 8 inch (General Purpose) (Open access)	Hemant Kshirsagar	Dipankar Saha	Nano Litho Lab	Working
128	Torrey Pines Scientific Hi-temp Hotplate (Open access)			Nano Litho Lab	Working
129	Torrey Pines Scientific Low-temp Hotplate (Open access)			Nano Litho Lab	Not Working

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)

LIC : Anjum Khan, Bikash Dev Choudhury (NH), Deepti Rukade

#	System Name	System Owner	Faculty in-charge	Location	Status
130	1.2 Lab wet bench (Open access)	Shilpa Kharat	Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
131	AJA 6 Target E beam Evaporator (Controlled access)	Siddarth Rastogi [H] Shilpa Kharat	Apurba Laha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Not Working
132	Ambios XP-2 Profilometer (Open access)	Anjum Khan	Suddhasatta Mahapatra	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
133	Ar-ion Milling (Open access)	Abhishek Erram Rachit Pandey (H)	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
134	ICPRIE GaN New (Controlled access)	Bhanu B Upadhyay [NH]	Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Partially Working
135	ICPRIE GaN Old (Open access)	NETAJI SUVACHINTAK	Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
136	Plasma asher (Open access)	Manisha Bansode Shilpa Kharat	Suddhasatta Mahapatra	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
137	Plasma Doping System (Open access)	Rowtu Srinu (H) Shubham Patil (H)	Udayan Ganguly	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Partially Working
138	PLD I (Controlled access)	Manisha Bansode Madhuri Mishra	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
139	PLD II (Open access)		Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
140	PLD III (Controlled access)		Apurba Laha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
141	PLD IV (Open access)	Madhuri Mishra Bhabani Prasad Sahu	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
142	Rapid Thermal Processing GaN (RTP GaN) (Controlled access)	Kanchan Singh Rana	Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
143	Rapid Thermal Processing Group IV (RTP Grp-IV) (Controlled access)	Shubham Patil (H) Rowtu Srinu (H)	Udayan Ganguly	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
144	RIE-1C Plasma Etcher– Samco (Controlled access)	Hemant Kshirsagar Shilpa Kharat	Suddhasatta Mahapatra	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working

NMPF Lab

LIC : Anjum Khan, Bikash Dev Choudhury (NH), Deepti Rukade, Hemant Kshirsagar

#	System Name	System Owner	Faculty in-charge	Location	Status
145	DI Water Plant (Open access)			NMPF Lab	Working
146	LPCVD Furnace_PolySi Doped PolySi (Controlled access)	Anjum Khan Hemant Kshirsagar	Udayan Ganguly	NMPF Lab	Working
147	LPCVD Furnace_SixNy (Controlled access)	Anjum Khan Hemant Kshirsagar	Udayan Ganguly	NMPF Lab	Working
148	LPCVD Furnace_Thermal oxidation (Controlled access)	Anjum Khan Hemant Kshirsagar	Udayan Ganguly	NMPF Lab	Not Working
149	NMPF Wetbench_2 inch RCA Piranha (Open access)	Hemant Kshirsagar Anjum Khan	Saurabh Lodha	NMPF Lab	Working
150	Wet bench_Metal etching (Open access)	Anjum Khan Hemant Kshirsagar	Saurabh Lodha	NMPF Lab	Working

PPMS Lab

LIC : Bikash Dev Choudhury (NH), Deepti Rukade

#	System Name	System Owner	Faculty in-charge	Location	Status
151	PPMS - Integrated cryogen-free system (Controlled access)	Akanksha Chouhan Heston Alfred Mendonca	Ashwin Tulapurkar	PPMS Lab	Partially Working

Spectroscopy Lab

LIC : Bikash Dev Choudhury (NH), NETAJI SUVACHINTAK

#	System Name	System Owner	Faculty in-charge	Location	Status
152	MFP-3D-AFM (Controlled access)	NETAJI SUVACHINTAK	Dipankar Saha	Spectroscopy Lab	Partially Working
153	Wafer bonder (Open access)	Gaurav Garg NH	Dipankar Saha	Spectroscopy Lab	Partially Working

Spintronics Lab

LIC : Bikash Dev Choudhury (NH), Deepti Rukade

#	System Name	System Owner	Faculty in-charge	Location	Status
154	Magneto Optic Kerr Effect (MOKE) (Controlled access)	Rachit Pandey (H) Akanksha Chouhan	Ashwin Tulapurkar	Spintronics Lab	Working
155	Magnetoresistance Setup with Vector Network Anlyser (VNA) and Rotating stage (Controlled access)	Akanksha Chouhan	Ashwin Tulapurkar	Spintronics Lab	Working

Wet Chemistry lab

LIC : Bikash Dev Choudhury (NH), Deepti Rukade, Madhuri Mishra, Minita Surwade (NH), Shilpa Kharat

#	System Name	System Owner	Faculty in-charge	Location	Status
156	2 inch RCA Clean Station (Open access)	Minita Surwade (NH) Shahiroze Khetani	Sandip Mondal	Wet Chemistry lab	Working
157	4 inch RCA Clean Station (Open access)	Minita Surwade (NH) Shahiroze Khetani	Saurabh Lodha	Wet Chemistry lab	Working
158	General Purpose Wet Bench (Wet Chemistry Lab) (Open access)	Minita Surwade (NH)	Saurabh Lodha	Wet Chemistry lab	Working
159	Olympus Microscope_2_Wet Chemistry Lab (Open access)	Pankajkumar Gound	Saurabh Lodha	Wet Chemistry lab	Working
160	Piranha Cleaning (Open access)	Minita Surwade (NH) Shilpa Kharat	Sandip Mondal	Wet Chemistry lab	Working
161	Scientific India Microscope (Open access)	Anjum Khan		Wet Chemistry lab	Not Working
162	TMAH wet etch station (Open access)	Minita Surwade (NH)	Saurabh Lodha	Wet Chemistry lab	Working

Marker	Meaning of marker
Not Working	Equipment may not be used
Partially Working	-- Equipment fully working but process not optimized -- Some parts of equipment not working. Eg. Heater in Metal sputter not working -- Not all processes that are possible in the tool are working -- Equipment working in manual mode temporarily. Eg. RAITH sample loading is manual sometimes
Fully Working	Fully operational
Critical Tool	Critical tools are widely used and their upkeep is of utmost priority. FICs should take the lead for driving the issues to make the tools UP on a high priority basis taking help from all teams (purchase, EMT, facility, process).

Definition of 'Controlled access' for Equipment in labs at IITBNF:

'Controlled access' is marked for certain tools to ensure that equipment is used on a priority basis for processing jobs which are part of Project deliverables and only after that they are made available for other users.

	not open for training.
	will be available for usage only through operators.
	will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.

Equipment Status

2D Materials and Devices Lab

7.1 Lab

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)

Bio Sensors Lab (NanoE bldg, 7th floor)

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)

EC Lab

MBE Clean Room 1 (NanoE bldg, Gr floor)

MBE Clean Room 2 (NanoE bldg, Gr floor)

MCL Lab

Micro1 Lab

Micro1 Yellow Room

Micro2 Lab

Nano 2 Lab

Nano Lab

Nano Litho Lab

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)

NMPF Lab

PPMS Lab

Spectroscopy Lab

Spintronics Lab

Wet Chemistry lab

Definition of 'Controlled access' for Equipment in labs at IITBNF:

IITBNF

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