Material & Structural Characterization Tools


A semiconductor device typically consists of multiple material layers/ films, each serving a definite purpose in the end device. These layers are processed at different stages of device fabrication and are required to have certain properties to serve their purpose. In this regard, physical and chemical characterization tools are necessary to evaluate material properties, and are therefore used extensively during device fabrication.

Physical characterization tools are used to ascertain physical properties of the film/ material such as crystalline structure, topography, refractive index, etc. On the other hand, chemical characterization tools are used to ascertain chemical properties such as atomic &/ or molecular structure, identification of chemical species, chemical reactivity, etc. When integrating new materials into devices or when attempting new device designs, these material characterization tools form a critical part of the research and device development.

IITBNF has an array of physical and chemical characterization tools that enable in-line (during fabrication) and post-fabrication investigation into material structure and related properties. They are listed as follows:

# Instrument Location Contamination category
1 Olympus Microscope_Nano Lab Nano Lab in line ac
2 Sentech Ellipsometer Nano Lab in line ac
3 Ambios XP-2 Profilometer Nanoelectronics Processing Lab (NanoE bldg, 1st floor) litho/analytical
4 Contact Angle Instrument (GBX) Bio Sensors Lab (NanoE bldg, 7th floor) gold contaminated
5 FTIR Bio Sensors Lab (NanoE bldg, 7th floor) litho/analytical
6 Fluorescence Microscope (Z1) Bio Sensors Lab (NanoE bldg, 7th floor) litho/analytical
7 UV-Vis-NIR Spectrometer - Lambda 750 Bio Sensors Lab (NanoE bldg, 7th floor) litho/analytical
8 Photoluminescence Measurement set up (PL Set up) Micro2 Lab litho/analytical
9 Filmetrics Reflectometer Micro2 Lab litho/analytical
10 DektakXT Profilometer Micro2 Lab litho/analytical
11 X-ray Photoelectron Spectroscopy Micro2 Lab litho/analytical
12 Olympus Microscope_2_Wet Chemistry Lab Wet Chemistry lab litho/analytical
13 UV-Vis-Spectrometer - Lambda 25 (7.1 Lab) 7.1 Lab litho/analytical
14 HRXRD Micro1 Lab in line ac
15 Temperature Dependent Spectral Response Measurement system - PL set up Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor) clean
16 Transient Absorption Pump Probe Spectrometer Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor) clean
17 PPMS - Integrated cryogen-free system PPMS Lab clean
18 Leica Microscope 7.1 Lab clean
19 Contact Angle System (Data Physics) 7.1 Lab off line a
20 FTIR Spectrometer (Spectrum 65) 7.1 Lab off line a
21 Optical Setup (micro-PL) 2D Materials and Devices Lab gold contaminated
22 MFP-3D-AFM Spectroscopy Lab in line ac
23 LabRAM HR Evolution-RAMAN 2D Materials and Devices Lab gold contaminated
To understand what the contamination categories mean, click here
To check if your process plan complies with contamination rules, click here
To view current working status of all the instruments, click here
Last updated on: 20-Jul-2022