RIGEL (Keysight B1500)
| Name of the Equipment | RIGEL (Keysight B1500) |
| Category | in line act |
| Operator | |
| System Owner | Shreyas Deshmukh 194070026@iitb.ac.in |
| Short Name | |
| Make/ Model | Keysight (earlier Agilent) B1500, Keithley K708B s |
| Critical Tool | No |
| Serial Number | NA |
| FootPrint | 1.5 meter x 2.5 meter |
| InstallationDate | 2013 |
| Equipment Type | Electrical characterization tools |
| Location | Device Characterization Lab(DC)(NanoE bldg, 3rd Floor) |
| AMC | Required |
| Local Dealer | Keysight Technologies India Pvt. Ltd. Keysight Technologies India Pvt. Ltd. 1st Floor, Splendor Forum, Jasola District Centre, New Delhi – 110025 ashutosh_dwivedi@keysight.com |
| Actual Dealer | Keysight Technologies India Pvt. Ltd. NA |
| Training & other policy documents | |
| Recipe List | |
| Glimpse | GLIMPSE/125_GLIMPSE.pdf |
| Tool Facilities Requirements | CDA, rotary pump |
| Access | Open |
| Lab Phone No | |
| Substrate allowed | Si/ Ge/ Metal and Materials that don't vaporize at Room Temp. |
| Substrate Dimension | Wafer : 1cm x 1cm - 5cm x 5cm & Pad-Size: Min- 50 micron x 50 micron |
| Chemical allowed | IPA for cleaning, Si/ Ge/ Metal and Materials that don't vaporize at Room Temp. |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks |