Equipment Details


In Thermal Evaporator

Name of the EquipmentIn Thermal Evaporator
Categorygold contaminated
OperatorGoma Kumari KC
System Owner
Short Name
Make/ ModelHHV/ 15F6T
Critical ToolNo
Serial NumberNA
FootPrint2x3 m
InstallationDate06/01/2011
Equipment TypeDeposition, Growth and Annealing systems
LocationMBE Clean Room 2 (NanoE bldg, Gr floor)
AMC Not Required
Local DealerHHV

Sunil Chingle -
Actual DealerHHV

Sunil Chingle -
Training & other policy documentsPOLICY/135_POLICY.pdf
Recipe List
Glimpse GLIMPSE/135_Glimpse.pdf
Tool Facilities RequirementsN2, Chilled water
AccessControlled
Lab Phone No
Substrate allowedSi, Ge, GaAs GaN, Glass, Quartz
Substrate DimensionPieces to 2 inch wafer
Chemical allowedNA, Indium only
Precursors/ Targets allowed
*Based on stock availability
Indium slugs
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNitrogen
Contamination remarksGold contaminated
Last updated on: 24-Oct-2026