TMAH wet etch station
| Name of the Equipment | TMAH wet etch station |
| Category | gold contaminated |
| Operator | Minita Surwade Minita Surwade |
| System Owner | Minita Surwade minita@iitb.ac.in |
| Short Name | |
| Make/ Model | / |
| Critical Tool | Yes |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Wet chemistry tools |
| Location | Wet Chemistry lab |
| AMC | Required |
| Local Dealer | |
| Actual Dealer | |
| Training & other policy documents | POLICY/136_POLICY.pdf |
| Recipe List | |
| Glimpse | GLIMPSE/136_GLIMPSE.pdf |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | |
| Substrate allowed | All |
| Substrate Dimension | |
| Chemical allowed | , All materials, gold lift off |
| Precursors/ Targets allowed *Based on stock availability | |
| Precursor/ Target loaded inside tool | |
| Target dimension | |
| Gases allowed | |
| Contamination remarks |