| Name of the Equipment | Spinner 2 inch (PPR -AZ) |
| Category | litho/analytical |
| Operator | Pankajkumar Gound
Gopika Suresh
Karuna Nyaupane
|
| System Owner | Pankajkumar Gound
p15129@iitb.ac.in
Hemant Kshirsagar
hemant@ee.iitb.ac.in
|
| Short Name | |
| Make/ Model | / WS-4008-6NPP/ LIT |
| Critical Tool | No |
| Serial Number | 05626 |
| FootPrint | 11 |
| InstallationDate | |
| Equipment Type | Lithography tools |
| Location | Nano Litho Lab |
| AMC | Not Required |
| Local Dealer | M/s Simco
|
| Actual Dealer | M/s Laurell Techonologies Corporation,441,Industri
E-mail:sales@laurell.com |
| Training & other policy documents | |
| Recipe List | |
| Glimpse | |
| Tool Facilities Requirements | N2 gas |
| Access | Open |
| Lab Phone No | |
| Substrate allowed | 2 |
| Substrate Dimension | 1/4 of 2 |
| Chemical allowed | Acetone for cleaning, PPR,AZ |
Precursors/ Targets allowed
*Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | wafers to be clean |
