Filmetrics Reflectometer
| Name of the Equipment | Filmetrics Reflectometer |
| Category | litho/analytical |
| Operator | Shilpa Kharat Shahiroze Khetani |
| System Owner | Gopika Suresh 30005372@iitb.ac.in Karuna Nyaupane 30005949@iitb.ac.in |
| Short Name | |
| Make/ Model | Japan/ F40 UV-VIS |
| Critical Tool | No |
| Serial Number | 12L306 |
| FootPrint | 3ft by 3ft |
| InstallationDate | 02/09/2013 |
| Equipment Type | Material and structural characterization tools |
| Location | Micro2 Lab |
| AMC | Required |
| Local Dealer | No local agent No Local Egent |
| Actual Dealer | Filmetrics, Inc. Filmetrics, Inc. 3560 Dunhill Street, Stc.100 San Diego, CA 92121, USA Tel No. (858)573-9300 EMail: chen@filmetrics.com |
| Training & other policy documents | POLICY/161_POLICY.pdf |
| Recipe List | |
| Glimpse | GLIMPSE/161_GLIMPSE.pdf |
| Tool Facilities Requirements | NA |
| Access | Open |
| Lab Phone No | Analytical |
| Substrate allowed | Any |
| Substrate Dimension | Bigger than 5mm x 5mm |
| Chemical allowed | All, All |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | NA |