X-ray Photoelectron Spectroscopy
| Name of the Equipment | X-ray Photoelectron Spectroscopy |
| Category | litho/analytical |
| Operator | Anjum Khan |
| System Owner | Anjum Khan anjum04@iitb.ac.in Deepti Rukade rdeepti@iitb.ac.in |
| Short Name | |
| Make/ Model | ULVAC-PHI/ PHI5000VersaProbeII |
| Critical Tool | Yes |
| Serial Number | NA |
| FootPrint | |
| InstallationDate | 12/02/2013 |
| Equipment Type | Material and structural characterization tools |
| Location | Micro2 Lab |
| AMC | Required |
| Local Dealer | Icon Analytical Icon Analytical Mr. Tushar B Mobile: 9320329883 E-Mail:tushar@iconanalytical.com |
| Actual Dealer | Ulvac-PHI Physical Electronics Mr.Shankar Raman Email: SRaman@phi.com |
| Training & other policy documents | POLICY/192_POLICY.pdf |
| Recipe List | |
| Glimpse | GLIMPSE/192_GLIMPSE.pdf |
| Tool Facilities Requirements | CDA, He, N2, Ar |
| Access | Controlled |
| Lab Phone No | |
| Substrate allowed | Thin film and powdered samples |
| Substrate Dimension | 0.5cm x 0.5cm to 2 inch |
| Chemical allowed | NA, |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | Sample cannot go back to other critical process equipments other than Off-line A equipments |