Spinner 2 Inch (PDMS)
| Name of the Equipment | Spinner 2 Inch (PDMS) |
| Category | gold contaminated |
| Operator | Minita Surwade |
| System Owner | Minita Surwade minita@iitb.ac.in |
| Short Name | |
| Make/ Model | NA/ NA |
| Critical Tool | No |
| Serial Number | NA |
| FootPrint | NA |
| InstallationDate | |
| Equipment Type | Miscellaneous |
| Location | EC Lab |
| AMC | Not Required |
| Local Dealer | NA NA |
| Actual Dealer | NA NA |
| Training & other policy documents | |
| Recipe List | |
| Glimpse | GLIMPSE/217_GLIMPSE.pdf |
| Tool Facilities Requirements | NA |
| Access | Open |
| Lab Phone No | |
| Substrate allowed | Glass, Si, Quartz, GaN, G aAs |
| Substrate Dimension | minimum quarter of a 2 inch wafer;maximum a 2 inch wafer |
| Chemical allowed | PDMS, |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | clean wafers |