Torrey Pines Low-temp Hotplate (max 180 deg C)
| Name of the Equipment | Torrey Pines Low-temp Hotplate (max 180 deg C) |
| Category | gold contaminated |
| Operator | |
| System Owner | |
| Short Name | |
| Make/ Model | Torrey Pines Scientific/ HP30A-2 |
| Critical Tool | No |
| Serial Number | 08180905 |
| FootPrint | 24cmX40cmX13cm |
| InstallationDate | |
| Equipment Type | Miscellaneous |
| Location | Nano Litho Lab |
| AMC | Not Required |
| Local Dealer | NA NA |
| Actual Dealer | NA NA |
| Training & other policy documents | |
| Recipe List | |
| Glimpse | GLIMPSE/222_GLIMPSE.pdf |
| Tool Facilities Requirements | Electrical connection |
| Access | Open |
| Lab Phone No | |
| Substrate allowed | Si, III-V, Glass, Sapphire, Quartz, fused silica |
| Substrate Dimension | Min- 1cmx1cm, Max- 4 inch - 8 inch wafer |
| Chemical allowed | IPA, Acetone, All that is allowed in NYR |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | use Al foil whenever required |