RaithEBL_Short (max 3 hr slot)
| Name of the Equipment | RaithEBL_Short (max 3 hr slot) |
| Category | litho/analytical |
| Operator | Hemant Kshirsagar Sony Muraleedharan Pradosh Sahoo |
| System Owner | Hemant Kshirsagar hemant@ee.iitb.ac.in Anuj Bathla (H) 184366003@iitb.ac.in |
| Short Name | |
| Make/ Model | Raith GmbH/ 150-Two |
| Critical Tool | Yes |
| Serial Number | Supra 35-29-89 |
| FootPrint | 187 cm* 78cm * 90cm |
| InstallationDate | 07/27/2008 |
| Equipment Type | Lithography tools |
| Location | Nano Litho Lab |
| AMC | Required |
| Local Dealer | Raith India Dr.S.V.Pandurangaiah Vice President- Customer Support, SIMCO Global Technology & Systems Ltd 305 MBC, 134 Infantry Road, Bangalore-560001 Cell:0091- 9945004355 Phone:0091-80-22862301 Fax:0091-80-22862301 e-mail:pandurangaiah.sv@simcogroup.in office e-mail:simco.bng@simcogroup.in website: www.simco-groups.com |
| Actual Dealer | Raith GmbH Mr. Andreas / Mr. Bernd, Raith GmbH Bernd Stegemann Technical Support Manager - Field Service email:stegemann@raith.de phone: +49 (231) 95004 230 - mobil: +49 (151) 46737102 fax: +49 (231) 95004 460 web: http://www.raith.com Raith Service & Support Team -- mailto:support@raith.de -- phone: +49 (0) 231 95004 - 499 |
| Training & other policy documents | POLICY/3_POLICY.pdf |
| Recipe List | RECEPIES/3_RECEPIES.pdf |
| Glimpse | GLIMPSE/3_GLIMPSE.pdf |
| Tool Facilities Requirements | Water chiller, compressor, nitrogen, ups, dehumidifier |
| Access | Open |
| Lab Phone No | Electron Beam Lithography |
| Substrate allowed | Si, III-V, Glass, Sapphire, Quartz, fused silica |
| Substrate Dimension | Min- 1cmx1cm, Max- 4 inch - 8 inch wafer |
| Chemical allowed | IPA, All Materials allowed. Powdered material avoided Powdered materials considered only on case by case basis |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | N2 |
| Contamination remarks | General purpose holder to be used for all INUP and out of the Dept Samples. Na, K, Cu is allowed on general purpose holder only. |