Rapid Thermal Process_NMPF Lab_General
| Name of the Equipment | Rapid Thermal Process_NMPF Lab_General |
| Category | gold contaminated |
| Operator | Pankajkumar Gound Shahiroze Khetani Minita Surwade |
| System Owner | Minita Surwade minita@iitb.ac.in Shahiroze Khetani 30005034@iitb.ac.in |
| Short Name | |
| Make/ Model | |
| Critical Tool | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Nano 2 Lab |
| AMC | Required |
| Local Dealer | |
| Actual Dealer | |
| Training & other policy documents | POLICY/335_POLICY.pdf |
| Recipe List | RECEPIES/335_RECEPIES.pdf |
| Glimpse | GLIMPSE/335_GLIMPSE.pdf |
| Tool Facilities Requirements | |
| Access | Controlled |
| Lab Phone No | Annealing and Oxidation |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | , |
| Precursors/ Targets allowed *Based on stock availability | |
| Precursor/ Target loaded inside tool | 63 |
| Target dimension | |
| Gases allowed | |
| Contamination remarks |