Wafer Dicer ADT
| Name of the Equipment | Wafer Dicer ADT |
| Category | gold contaminated |
| Operator | Hemant Kshirsagar Pankajkumar Gound |
| System Owner | Hemant Kshirsagar hemant@ee.iitb.ac.in Pankajkumar Gound p15129@iitb.ac.in |
| Short Name | |
| Make/ Model | ADT7122 |
| Critical Tool | Yes |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Miscellaneous |
| Location | Micro2 Lab |
| AMC | Required |
| Local Dealer | Mr. Rajalingam rajalingam@sms-in.com Ph - 9849307555 |
| Actual Dealer | Advanced Dicing Technologies |
| Training & other policy documents | |
| Recipe List | |
| Glimpse | GLIMPSE/342_GLIMPSE.pdf |
| Tool Facilities Requirements | N2 plant, chilled water, tap water |
| Access | Controlled |
| Lab Phone No | |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | , |
| Precursors/ Targets allowed *Based on stock availability | |
| Precursor/ Target loaded inside tool | 63 |
| Target dimension | No restriction on minimum size. Maximum 8 inch wafer |
| Gases allowed | |
| Contamination remarks |