2D Materials CVD
| Name of the Equipment | 2D Materials CVD |
| Category | clean |
| Operator | |
| System Owner | Sera Sen (H) 30004345@iitb.ac.in Mamta Raturi 20003599@iitb.ac.in |
| Short Name | |
| Make/ Model | PlanarTECH/PlanarGROW-2M |
| Critical Tool | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | 03/01/2020 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | 2D Materials and Devices Lab |
| AMC | Required |
| Local Dealer | |
| Actual Dealer | |
| Training & other policy documents | POLICY/348_POLICY.pdf |
| Recipe List | |
| Glimpse | GLIMPSE/348_GLIMPSE.pdf |
| Tool Facilities Requirements | Liquid Nitrogen, Quartz tube |
| Access | Controlled |
| Lab Phone No | |
| Substrate allowed | Si, Quartz, Sapphire |
| Substrate Dimension | NA |
| Chemical allowed | PTAS, Molybdenum, tungsten, sulphur - powders |
| Precursors/ Targets allowed *Based on stock availability | Bring your own targets |
| Precursor/ Target loaded inside tool | |
| Target dimension | |
| Gases allowed | N2, AR |
| Contamination remarks |