Microwriter ML 3
| Name of the Equipment | Microwriter ML 3 |
| Category | litho/analytical |
| Operator | Pankajkumar Gound Gopika Suresh Sheetal Yadav |
| System Owner | Gopika Suresh 30005372@iitb.ac.in Pankajkumar Gound p15129@iitb.ac.in |
| Short Name | |
| Make/ Model | Durham Magneto Optics LTD |
| Critical Tool | No |
| Serial Number | |
| FootPrint | 2x2.5 m |
| InstallationDate | 02/07/2023 |
| Equipment Type | Lithography tools |
| Location | Nano Litho Lab |
| AMC | Required |
| Local Dealer | QUANTUM DESIGN INDIA PVT. LTD QUANTUM DESIGN INDIA PVT. LTD. 6111 Rupa Solitaire Plot Np. A1 Sector 1 Millenium Business Park Mahape Mumbai Suburban 400710 Maharashtra India Phone No, 02227781011 |
| Actual Dealer | Durham Magneto Optics Ltd Durham Magneto Optics Ltd Church Farm Grandsen Road Caxton Cambridge CB233PL United Kingdom Email ID: J.kite@durhammagnetooptics.com Phone. No. 447979957377 |
| Training & other policy documents | POLICY/0_POLICY.pdf |
| Recipe List | |
| Glimpse | GLIMPSE/354_GLIMPSE.pdf |
| Tool Facilities Requirements | Electrical connections, N2 |
| Access | Open |
| Lab Phone No | Optical Lithography |
| Substrate allowed | Silicon, Quartz, Sapphire, GaN |
| Substrate Dimension | 5mmx5mm |
| Chemical allowed | Photo resist, Photo Resist |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | N2 |
| Contamination remarks | Sodium and potassium contamination is not allowed. |