Rapid Thermal Processing Group IV (RTP Grp-IV)
| Name of the Equipment | Rapid Thermal Processing Group IV (RTP Grp-IV) |
| Category | semi clean b |
| Operator | |
| System Owner | Nihal Raut 23d0514@iitb.ac.in |
| Short Name | NA |
| Make/ Model | Annealsys AS-one 100 |
| Critical Tool | Yes |
| Serial Number | |
| FootPrint | 550mm(W) x 800mm(D) |
| InstallationDate | 08/16/2022 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Nanoelectronics Processing Lab (NanoE bldg, 1st floor) |
| AMC | Required |
| Local Dealer | El Camino Technologies Pvt. El Camino Technologies Pvt. Ltd. #8, 1st block, 1st main, BEL Layout, Vidyaranyapura, Bangalore - 560097, INDIA. Tel: 91 80 23640503 Contact Person: Amaresh.N.G, Maintenance Engineer, MOB NO - 09900836368 e-mail: maintenance@elcamino.in, Contact Person: 1) Chetna Mohan: chetnamohan@elcamino.in 2) Amaresh N G: maintenance@elcamino.in (+919900836368) |
| Actual Dealer | Annealsys Annealsys Bat T2, PIT de la Pompignane, Rue de la Vieille Poste, 34055 Montpellier Cedex 1, France Phone: +33 467 20 23 63 Email: info@annealsys.com Contact Person(s): 1) Frank Laporte: flaporte@annealsys.com, 2) 2) Albin Diranzo: adiranzo@annealsys.com |
| Training & other policy documents | POLICY/355_POLICY.pdf |
| Recipe List | |
| Glimpse | |
| Tool Facilities Requirements | Chiller water, PN2, GN2,Ar, O2, N2, FGA, N2O |
| Access | Controlled |
| Lab Phone No | |
| Substrate allowed | Only Si, Ge, and Diamond substrates are allowed. |
| Substrate Dimension | 0.5 by 0.5 mm to 4 inches wafer |
| Chemical allowed | IPA for cleaning, SiO2, Gd2O3, ZrO2, HfO2, HZO, Al2O3 |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 47,1 |
| Target dimension | NA |
| Gases allowed | Ar, O2, N2, FGA, N2O |
| Contamination remarks | Samples with metals are not allowed. Samples with photoresist are not allowed. Gold contaminated, Outside samples, NCPRE Samples, OE Lab, Na+ & K+ not allowed further information contact SO/Process Technologist |