EBL Voyager
| Name of the Equipment | EBL Voyager |
| Category | litho |
| Operator | Anjum Khan Pradosh Sahoo |
| System Owner | Anjum Khan anjum04@iitb.ac.in Kanchan Singh Rana 204070029@iitb.ac.in |
| Short Name | |
| Make/ Model | VOYAGER System |
| Critical Tool | No |
| Serial Number | 3-000-872 |
| FootPrint | |
| InstallationDate | 03/20/2024 |
| Equipment Type | Lithography tools |
| Location | Nano 2 Lab |
| AMC | Required |
| Local Dealer | Raith India Dr.S.V.Pandurangaiah Mr. Masum Khan | CEO | Raith India Pvt. Ltd. Sri Krishna Complex, No 36, 2nd Floor Opposite to Mother Theresa School M. E. S. Ring Road, Bangalore – 560054 T: +91 80 28384949|F:+91 80 28384949|C:+91 9902991786 masum.khan@raith.com | pandurangaiah.sv@raith.com |
| Actual Dealer | Raith GmbH Dr. Oleksiy Andreyev Senior Application Engineer System Qualification & Customer Support Mail:Oleksiy.Andreyev@raith.com Phone:+49 (231) 95004 239 Mobile: Headquarters:+49 (231) 95004 0 Helpdesk:+49 (231) 95004 499 Raith GmbH - Konrad-Adenauer-Allee 8 - 44263 Dortmund - Germany Managing director: Dr. Michael Steigerwald - trade register: Dortmund HRB 8984 tax number : 315/5765/0135 - VAT number: De 124 727 617 |
| Training & other policy documents | POLICY/356_POLICY.pdf |
| Recipe List | RECEPIES/356_RECEPIES.pdf |
| Glimpse | GLIMPSE/356_GLIMPSE.pdf |
| Tool Facilities Requirements | Water chiller, compressor, nitrogen, ups, dehumidifier |
| Access | Open |
| Lab Phone No | Electron Beam Lithography |
| Substrate allowed | Si, III-V, Glass, Sapphire, Quartz, fused silica |
| Substrate Dimension | Min - 1cmx1cm, Max- 4 inch wafer |
| Chemical allowed | IPA, All Materials allowed. Powdered material avoided |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | N2 |
| Contamination remarks | Litho/ Analytical |