New ALD
| Name of the Equipment | New ALD |
| Category | clean |
| Operator | Anjum Khan |
| System Owner | Mansi Patil 23d0522@iitb.ac.in Sera Sen (H) 30004345@iitb.ac.in |
| Short Name | |
| Make/ Model | |
| Critical Tool | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Nano Lab |
| AMC | Required |
| Local Dealer | |
| Actual Dealer | |
| Training & other policy documents | POLICY/359_POLICY.pdf |
| Recipe List | |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | , |
| Precursors/ Targets allowed *Based on stock availability | |
| Precursor/ Target loaded inside tool | |
| Target dimension | |
| Gases allowed | |
| Contamination remarks |