| Name of the Equipment | THAM wet bench user_specific_processes approved by process committee |
| Category | clean |
| Operator | |
| System Owner | Minita Surwade
minita@iitb.ac.in
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| Short Name | |
| Make/ Model | |
| Critical Tool | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Wet Chemistry lab |
| AMC | Required |
| Local Dealer |
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| Actual Dealer |
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| Training & other policy documents | |
| Recipe List | |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | , |
Precursors/ Targets allowed
*Based on stock availability | |
| Precursor/ Target loaded inside tool | |
| Target dimension | |
| Gases allowed | |
| Contamination remarks | |
