4 target E-beam evaporator
| Name of the Equipment | 4 target E-beam evaporator |
| Category | gold contaminated |
| Operator | Minita Surwade Akula Rao Gopika Suresh |
| System Owner | Shahiroze Khetani 30005034@iitb.ac.in Minita Surwade minita@iitb.ac.in |
| Short Name | |
| Make/ Model | Hind Hi Vacuum Systems/ HHV 15K |
| Critical Tool | Yes |
| Serial Number | HHV 15K |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | EC Lab |
| AMC | Required |
| Local Dealer | Shailesh Jhanwar & Sunil Chingle Shailesh Jhanwar: sajawharkar@gmail.com 09224571350 |
| Actual Dealer | Hind Hi Vacuum Systems Hind High Vacuum Company Private Limited Site No. 17, Phase 1, Peenya Industrial Area Bangalore- 560 058 India. Tel: 91 80 41931000 Fax: 91 80 2839 4874. E-mail: info@hhv.in |
| Training & other policy documents | POLICY/82_POLICY.xlsx |
| Recipe List | |
| Glimpse | GLIMPSE/82_GLIMPSE.pdf |
| Tool Facilities Requirements | PN2, Chiller |
| Access | Open |
| Lab Phone No | Deposition: PVD, E-beam and Thermal Evaporator |
| Substrate allowed | Quartz, Silicon, Polymer, GaN |
| Substrate Dimension | Approx 4 inch or lesser size |
| Chemical allowed | For cleaning of the system Methanol is used., Zn slug, Cr slug, Ag slug, Ta slug, Fe slug, Au slug, Pt slug(not working), AuGe slug, Co slug, Cu slug, Ti slug, Al slug, Mg slug, Pd slug, Ge slug, Gd slug, Mo slug, Mn slug, Mgo slug, W slug(not working), Tb slug, Yb slug, Ni slug, NiFe slug,si,a-si |
| Precursors/ Targets allowed *Based on stock availability | Palladium Slug, Gold Germanium slug, Manganese, Titanium Slug, Gd Slug, Terbium pieces, Gold, Zinc Slug , Germanium |
| Precursor/ Target loaded inside tool | |
| Target dimension | slugs of size 1.125 |
| Gases allowed | PN2 |
| Contamination remarks | Gold Contaminated |