Thermal Evaporator - Al
| Name of the Equipment | Thermal Evaporator - Al |
| Category | gold contaminated |
| Operator | Gopika Suresh Akula Rao Shahiroze Khetani |
| System Owner | Gopika Suresh 30005372@iitb.ac.in Akula Rao 30007057@iitb.ac.in |
| Short Name | |
| Make/ Model | / |
| Critical Tool | No |
| Serial Number | |
| FootPrint | 200 x 140 x 203 cm |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | EC Lab |
| AMC | Required |
| Local Dealer | Mr. Khan Hind Hivac, Mr. Khan, Bangalore, Mob. - 9740992085, Email ID - info@hivacindia.com |
| Actual Dealer | |
| Training & other policy documents | POLICY/88_POLICY.pdf |
| Recipe List | RECEPIES/88_RECEPIES.pdf |
| Glimpse | GLIMPSE/88_Glimpse.pdf |
| Tool Facilities Requirements | LN2, Water |
| Access | Open |
| Lab Phone No | Deposition: PVD, E-beam and Thermal Evaporator |
| Substrate allowed | Glass, Silicon, Polymer, glass, qurtz, Ge |
| Substrate Dimension | small pecies to 4 inch |
| Chemical allowed | IPA, Any material (including photoresists) that will not evaporate up to 100 C |
| Precursors/ Targets allowed *Based on stock availability | Al |
| Precursor/ Target loaded inside tool | |
| Target dimension | pellets, slugs |
| Gases allowed | Liquid Nitrogen |
| Contamination remarks | Separate crucibles need to be used for different metals |