Thermal Evaporator-Cr/Au
| Name of the Equipment | Thermal Evaporator-Cr/Au |
| Category | gold contaminated |
| Operator | Shahiroze Khetani Gopika Suresh Akula Rao |
| System Owner | Gopika Suresh 30005372@iitb.ac.in Shahiroze Khetani 30005034@iitb.ac.in |
| Short Name | NA |
| Make/ Model | HindHiVac/ 12A40 |
| Critical Tool | No |
| Serial Number | 1911 |
| FootPrint | 200 x 140 x 203 cm |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | EC Lab |
| AMC | Required |
| Local Dealer | Mr Shailesh Ph: Branch Office: Mumbai Head Office: Bangalore |
| Actual Dealer | Hind HiVac CORPORATE OFFICE, HEAD OFFICE & FACTORY: HINDHIVAC PVT. LTD. SITE NO. 17, PHASE-1, PEENYA INDUSTRIAL AREA, BANGALORE - 560 058. PHONE : 91-80-2839 4615, 17 FAX : 91-80-2839 4874. E-mail : info@hindhivac.com http://www.indiabuildinginfo.com/virtual-icore/hindhivaccontact.htm |
| Training & other policy documents | POLICY/89_POLICY.pdf |
| Recipe List | RECEPIES/89_RECEPIES.pdf |
| Glimpse | GLIMPSE/89_GLIMPSE.pdf |
| Tool Facilities Requirements | 1. Chiller & water supply 2. Liquid Nitrogen |
| Access | Open |
| Lab Phone No | Deposition: PVD, E-beam and Thermal Evaporator |
| Substrate allowed | FTO Glass,Quartz , Silicon, Polymer, GaAs, |
| Substrate Dimension | Approx 4 inch or lesser size |
| Chemical allowed | , Polymer, Any material that can withstand 100degC,Glass substrate is not allowed |
| Precursors/ Targets allowed *Based on stock availability | Any metal other than Cr & Au, taking Chromium (Melting Point :977degC @ 10E-6 mbar) as baseline, follow the link : http://projects.olin.ed u/thinfilms |
| Precursor/ Target loaded inside tool | |
| Target dimension | Any metal other than Cr & Au, taking Chromium (Melting Point :977degC @ 10E-6 mbar) as baseline, fol |
| Gases allowed | |
| Contamination remarks |