Laser Writer
| Name of the Equipment | Laser Writer |
| Category | litho/analytical |
| Operator | |
| System Owner | Deepti Rukade rdeepti@iitb.ac.in |
| Short Name | |
| Make/ Model | Microtech/ LW405 |
| Critical Tool | Yes |
| Serial Number | 07151003 |
| FootPrint | 50inchx30inch |
| InstallationDate | 05/22/2007 |
| Equipment Type | Lithography tools |
| Location | Nanoelectronics Processing Lab (NanoE bldg, 1st floor) |
| AMC | Required |
| Local Dealer | Mr. M.M.C. Kishore Mr. M.M.C. Kishore Global Marketing Services, Bangalore, India |
| Actual Dealer | MICROTECH S.R.L. MICROTECH s.r.l. Corso Pisani 22, 90129 Palermo, Italy,90129 Palermo. Phone: +39 091 730 3091 Fax: +39 091 730 7911 E-mail: mail@microtechweb.com |
| Training & other policy documents | POLICY/92_POLICY.pdf |
| Recipe List | RECEPIES/92_RECEPIES.PDF |
| Glimpse | GLIMPSE/92_GLIMPSE.pdf |
| Tool Facilities Requirements | HotPlate, DI Water, N2 Gun |
| Access | Open |
| Lab Phone No | |
| Substrate allowed | Iron oxide mask plates/ Si wafer |
| Substrate Dimension | 3inch and 5 inch mask plates |
| Chemical allowed | NA, Iron oxide mask plates/ Si wafer |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | NA |