PLD II
| Name of the Equipment | PLD II |
| Category | clean |
| Operator | |
| System Owner | Shreyasi Das 23d0526@iitb.ac.in Mayank Goyal 22d0542@iitb.ac.in |
| Short Name | |
| Make/ Model | Excel Instruments/ NA |
| Critical Tool | No |
| Serial Number | NA |
| FootPrint | Length 1.95 mtr, Breadth 2.28 mtr, Height1.57 |
| InstallationDate | 09/04/2009 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Nanoelectronics Processing Lab (NanoE bldg, 1st floor) |
| AMC | Required |
| Local Dealer | Dr. Subhash Pai Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093 |
| Actual Dealer | Dr. Subhash Pai Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093 |
| Training & other policy documents | POLICY/96_Policy.pdf |
| Recipe List | |
| Glimpse | GLIMPSE/96_Glimpse.pdf |
| Tool Facilities Requirements | Ar, O2, Water |
| Access | Open |
| Lab Phone No | |
| Substrate allowed | Si/ Ge/ GaN/ Quartz/ GaA s/ STO/ LAO/ MgO |
| Substrate Dimension | 2cm x 2cm max |
| Chemical allowed | IPA/ Methanol (for cleaning), BFO/ BDFO/ LSMO/ PCMO/ PZT/ MgO/ STO/ PTFO/ PTS/ SRO / LiFePO4 / LiCoO2/ Co2MnSi |
| Precursors/ Targets allowed *Based on stock availability | BFO/ BDFO/ LSMO/ PCMO/ PZT/ MgO/ STO/ PTFO/ PTS/ SRO / LiFePO4 / LiCoO2/ Co2MnSi |
| Precursor/ Target loaded inside tool | |
| Target dimension | |
| Gases allowed | Oxgen |
| Contamination remarks | No Photoresists |